COATING LIQUID SUPPLY APPARATUS AND SLIT COAT TYPE COATING APPARATUS

PROBLEM TO BE SOLVED: To provide a coating liquid supply apparatus including working fluid actuating type diaphragm pump without mixing a work fluid operating chamber with air and allowing a slit coat type coating apparatus to be always stably operated. SOLUTION: In the above diaphragm pump 40, a closed fluid supply hole 46 is provided between two support means 28a and 28b for supporting the outer peripheral face of a piston in a state of closure and so as to allow reciprocation in two positions apart in a piston moving direction in the inner peripheral face of a piston holding hole 26a in a piston housing 26' communicating with the work fluid operating chamber 20 separated from a coating liquid chamber 14 by a diaphragm 18 in a valve housing 22. The closed fluid is supplied under pressure to this supply hole from a closed fluid pressure supply source 48, and a breather hole 50 discharging gas in a gap between the above inner peripheral face and the outer peripheral face of the piston outward when supplying the closed fluid is provided between two closed support means in the above inner peripheral face. COPYRIGHT: (C)2006,JPO&NCIPI