DATA COLLECTING SYSTEM IN SEMICONDUCTOR MANUFACTURING EQUIPMENT, DATA COLLECTING METHOD, AND ITS PROGRAM

PROBLEM TO BE SOLVED: To collect data which are synchronized in real time and are of reliability without increasing a load in application of semiconductor manufacturing equipment substantially. SOLUTION: A data collecting server, which is connected with the semiconductor manufacturing equipment, a host, and an analysis system, allocates a status identifier of non-routine data to be needed, receives a data request message from the host and analysis system, judges whether the status identifier and collection event identifier contained in the data request message are defined in the manufacturing equipment, decides that the information not supported by the manufacturing equipment is the non-routine data request message, transfers a routine data request message to the manufacturing equipment, collects the non-routine data from a non-routine data detector, and processes the collected non-routine data together with the non-routine data synchronized with the routine data when receiving a first routine data from the manufacturing equipment. COPYRIGHT: (C)2006,JPO&NCIPI