IP MEASURING DEVICE FOR TRANSFER MASK, AND METHOD FOR SUPPLYING ELECTROSTATIC CHUCK WITH VOLTAGE THEREFOR

PROBLEM TO BE SOLVED: To provide an IP (image placement) measuring device for a transfer mask which is capable of automatic execution of IP measurement work. SOLUTION: The IP measuring device is provided in the form of a combined member 80 which is a combination of the transfer mask and a chuck to r...

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Bibliographische Detailangaben
Hauptverfasser:	SANO NAOTAKE, TAKIGAWA TADAHIKO, FUJITA HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONVEYING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an IP (image placement) measuring device for a transfer mask which is capable of automatic execution of IP measurement work. SOLUTION: The IP measuring device is provided in the form of a combined member 80 which is a combination of the transfer mask and a chuck to retain the mask, or of the transfer mask, chuck, and an adaptor for bearing them. The combined member 80 executes all the work while maintaining its combined form, and is provided with voltage supplying power source 60 which supplies the chuck with a given voltage for static suction, and with a plurality of circuits 61, 62, 63 through which the voltage is supplied from the power source to the chuck. Each circuit takes its share of voltage supply for static suction to the chuck at part of the entire path of movement of the chuck, and keeps supplying in combination the voltage for static suction to the chuck along the entire path. COPYRIGHT: (C)2006,JPO&NCIPI