HEAT TREATMENT APPARATUS

PROBLEM TO BE SOLVED: To provide a heat treatment apparatus capable of stacking heated objects in high density to apply heat treatment with the narrow spacing of stacking stages for stacking the heated objects. SOLUTION: The heat treatment apparatus has a heat treatment chamber into which hot air generated in a hot air supply means is led. A gondola with a large number of stacking stages 56 fixed at vertically equal spaces to a gondola frame, is arranged in the heat treatment chamber. The stacking stage 56 is provided with a substrate support mechanism 53 comprising a lifting mechanism 52 and a support body 50 disposed inside a frame member 57. The substrate support mechanism 53 can advance/retreat the support body 50 from the surface of the frame member 57 by regulating air pressure in an air chamber 60 by an air pressure regulating means to extend/contract a cylindrical body 62. COPYRIGHT: (C)2006,JPO&NCIPI