PROXIMITY EXPOSURE DEVICE

PROBLEM TO BE SOLVED: To provide a proximity exposure device which can reliably prevent a mask from dismounting from a mask holding frame, even if vacuum pressure for sucking and holding the mask is stopped. SOLUTION: A mask dismount preventing mechanism 40 is provided for supporting the lower surface of an end of a mask M sucked and held on a mask suction part 26 from its underside. The mask dismount preventing mechanism comprises a clamper 42 positioned at the lower side of the end of the mask held on the mask suction part, abutment members 44 located on the clamper 42, a cylinder with brake 46 for moving the clamper vertically, and a controller for controlling the driving operation of the cylinder. The controller controls the clamper, in such a manner that the cylinder is put in its braked state before the clamper abuts against the lower surface of the end of the mask, but the cylinder is put in its brake relief state, after the clamper abuts against the lower surface of the mask, and then the cylinder is put in the braked state, after the passage of a predetermined time. COPYRIGHT: (C)2006,JPO&NCIPI