FUNCTIONAL LIQUID FILLING METHOD, DROPLET DELIVERY APPARATUS, METHOD FOR MANUFACTURING ELECTROOPTIC APPARATUS, ELECTROOPTIC APPARATUS, AND ELECTRONIC EQUIPMENT

PROBLEM TO BE SOLVED: To efficiently discharge air bubbles mixed in a pressure control valve and to shorten a filling time at the time of initial filling with a functional liquid. SOLUTION: The subject filling method is for initially filling a functional liquid into a functional liquid feed passage comprising an in-valve passage 61r in a pressure control valve 61 for feeding the functional liquid introduced from a functional liquid tank 62 into a functional liquid droplet delivery head 71 and regulating the pressure by a diaphragm 221 using the atmospheric pressure as a regulating standard pressure, a tank-side feed passage 81r continued from the functional liquid tank 62 into the pressure control valve 61, a head-side feed passage 82r continued from the pressure control valve 61 into a functional liquid droplet delivery head 71, and an in-head passage 71r in the functional liquid droplet delivery head 71. This method comprises the steps of subjecting the diaphragm 221 to minus deformation by a pressing means 7, sucking the functional liquid through a cap 102 in intimate contact with a nozzle face 78 in the functional liquid droplet delivery head 71, and releasing the pressing force in the pressing means 7 after passing of the functional liquid into the functional liquid feed passage by functional liquid suction. COPYRIGHT: (C)2006,JPO&NCIPI