SOLAR CELL
PROBLEM TO BE SOLVED: To provide a solar cell having a good hydrogen concentration and a sheet resistance value whereby having high carrier life time and high conversion efficiency. SOLUTION: The solar cell is provided with a silicon nitride film on the side of light receiving surface of a p-type cr...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a solar cell having a good hydrogen concentration and a sheet resistance value whereby having high carrier life time and high conversion efficiency. SOLUTION: The solar cell is provided with a silicon nitride film on the side of light receiving surface of a p-type crystalline silicon substrate and an electrode formed of calcinated aluminum on a surface opposed to the light receiving surface. The joint density of hydrogen in the silicon nitride film is specified so as to be more than 4.0×1021cm-3and less than 5.0×1021cm-3, while the sheet resistance value of a p+-layer formed at a side opposed to the light receiving surface is specified so as to be more than 30 Ω/square and less than 35 Ω/square. COPYRIGHT: (C)2006,JPO&NCIPI |
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