OPTICAL CHARACTERISTIC MEASURING DEVICE AND METHOD, SEMICONDUCTOR EXPOSURE DEVICE AND EXPOSURE METHOD USING OPTICAL CHARACTERISTIC MEASURING DEVICE, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a measuring device and a method for measuring highly accurately an optical characteristic of an optical system to be inspected. SOLUTION: In order to solve the problem, this measuring device for measuring the optical characteristic of the optical system to be inspect...

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Bibliographische Detailangaben
1. Verfasser:	KATO MASAKIYO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a measuring device and a method for measuring highly accurately an optical characteristic of an optical system to be inspected. SOLUTION: In order to solve the problem, this measuring device for measuring the optical characteristic of the optical system to be inspected by using interference is characterized by having a spherical surface wave generation means illuminated by light from a light source, for generating a spherical surface wave; a light splitting means for splitting the light from the light source; a mask having a slit arranged on a position where light on one side in light passing the spherical surface wave generation means and the light splitting means to be thereby changed into two spherical surface waves and entering the optical system to be inspected is condensed; and a light receiving means for receiving interference fringes formed by light passing the slit and light not passing the slit via the optical system to be inspected. COPYRIGHT: (C)2006,JPO&NCIPI