DYNAMIC FOCUSING METHOD AND EQUIPMENT THEREOF

PROBLEM TO BE SOLVED: To provide a method of dynamically performing the focusing of an imaging mechanism on a moving target front surface having a variable shape. SOLUTION: The focusing of the imaging mechanism on the target front surface is dynamically performed by the steps of (1) making a model o...

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Bibliographische Detailangaben
Hauptverfasser:	BROWN GERALD, DELSEY BRIAN, HARLESS MARK, VAUGHNN DAVID, GOYAL SHAILESHKUMAR, WATKINS CORY, SIMPKINS PAT
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method of dynamically performing the focusing of an imaging mechanism on a moving target front surface having a variable shape. SOLUTION: The focusing of the imaging mechanism on the target front surface is dynamically performed by the steps of (1) making a model of a geometry of the target front surface, (2) measuring relative positions at a predetermined number of places on the target front surface, (3) applying the model to the target front surface by using the predetermined number of places on the target front surface, and (4) performing focusing of the imaging mechanism on the moving target front surface by using data obtained by applying the model to the target front surface. COPYRIGHT: (C)2006,JPO&NCIPI