MANUFACTURING METHOD OF CERAMIC SUBSTRATE

PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic substrate which can be manufactured in quantity at once and hardly generates burr in the manufacturing method of a ceramic substrate with open cavity whose side is opened without forming a wall in one side. SOLUTION: An aggregate substrate 6 is manufactured so that two substrate units of the ceramic substrate are connected and the open side of the open cavity coincides with a separation predetermined line I'. Break grooves b1, b2 are formed each from a first main surface CP1 and a second main surface CP2 on a pair of wall parts facing across the open cavity, and a break through hole is formed along the separation predetermined line I' in a cavity bottom surface 4. The substrate units are separated mutually by the break groove and the break through hole. COPYRIGHT: (C)2006,JPO&NCIPI