ELECTRONIC DEVICE HAVING A PLURALITY OF CONDUCTIVE BEAMS

ELECTRONIC DEVICE HAVING A PLURALITY OF CONDUCTIVE BEAMS

PROBLEM TO BE SOLVED: To decrease a heat generation property of an electronic device in a field of, in particular, MEMS. SOLUTION: This electronic device is provided with a first conductive pad 121, a second conductive pad 122, and a first plurality of conductive beams 131 generally parallel to one...

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Bibliographische Detailangaben
Hauptverfasser: MCCONICA CAROL, MCKINNELL JAMES C, CHAMPION DAVID
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To decrease a heat generation property of an electronic device in a field of, in particular, MEMS. SOLUTION: This electronic device is provided with a first conductive pad 121, a second conductive pad 122, and a first plurality of conductive beams 131 generally parallel to one another. Each of the first plurality of beams has: a central region 132 having a beam resistance; a first end region 134 extending from the central region to the first conductive pad; and a second end region 136 extending from the central region to the second conductive pad. Each of the first and second end regions includes an end resistance lower than the beam resistance. COPYRIGHT: (C)2006,JPO&NCIPI