SURFACE ACOUSTIC WAVE DEVICE SENSOR

PROBLEM TO BE SOLVED: To provide a surface acoustic wave device sensor, capable of simultaneously and precisely detecting environmental variable factors represented by physicochemical parameters (temperature, humidity, load, atmospheric pressure, gas component, magnetism, material damages, biological sample microanalysis and the like) resulting from various environmental information and biological medical factors, based on changes in a surface acoustic wave propagation properties, by making a surface acoustic wave (SAW) multichanneled and multifunctional which is generated on a piezo-electric type substrate. SOLUTION: In the surface acoustic wave (SAW) device sensor 1, high-frequency current or high-frequency voltage is applied to an element made up by bonding an IDT 3 to the piezo-electric type substrate 2, whereby the surface acoustic wave (SAW) 5 is generated near the surface of the piezo-electric type substrate 2, and an environmental variable factor is detected on the basis of the propagation property of the SAW 5. A SAW propagating path 4, made up of a plurality of functional thin films 6, is formed to be multichanneled on the piezo-electric type substrate 2, thereby simultaneously detecting the plurality of environmental variable factors. COPYRIGHT: (C)2006,JPO&NCIPI