TRANSPORT DEVICE FOR PRECISION THIN-SHEET MATERIAL
PROBLEM TO BE SOLVED: To provide a transport device for a precision thin-sheet material that can minimize impacts, when a gripping member grips an edge part of the precision thin-sheet material. SOLUTION: A speed reduction means 7 is installed that slows down the movement speed of multiple gripping...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a transport device for a precision thin-sheet material that can minimize impacts, when a gripping member grips an edge part of the precision thin-sheet material. SOLUTION: A speed reduction means 7 is installed that slows down the movement speed of multiple gripping members (10A, 10B, 11A, 11B, 32A, 32B, and 33) gripping an edge of a precision thin-sheet material (15), immediately prior to touching the edge of the precision thin sheet material (15). By adopting such a structure, the movement speed can be slowed down, immediately before the touching of the precision thin sheet material by the gripping members; and so, the impact of the gripping members to the precision thin sheet material lessens, and as a result, occurrence of particles damaged due to the impact can be minimized. COPYRIGHT: (C)2006,JPO&NCIPI |
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