CONVEYANCE METHOD, CARRIER APPARATUS, EXPOSURE DEVICE AND ABSORBED STATE DETECTING METHOD

PROBLEM TO BE SOLVED: To provide a conveyance method and a carrier apparatus capable of conveying a desired conveyance object in a short time at a high speed. SOLUTION: In the conveyance method of conveying a body by absorbing and maintaining a object of conveyance to absorption maintaining means; and by moving the absorption maintaining means, strength is detected on an absorption power to the body absorbed and maintained to the absorption maintaining means, and a passing speed of the absorption maintaining means is controlled, based on the strength of the detected absorption power. For example, the strength of the detected absorption power is compared with a predetermined reference value. As a result, when the strength of the absorption power is smaller than the reference value, the absorption maintaining means is moved at a predetermined low speed. When the strength of the absorption power is larger than the reference value, the absorption maintaining means is moved at a predetermined high speed. Since the conveyance speed is controlled according to the strength of the absorption power in the state that the conveyance object is actually absorbed and maintained in the absorption maintenance state, an optimal, that is, fastest conveyance speed can be set, and consequently the body conveyance time can be shortened. COPYRIGHT: (C)2006,JPO&NCIPI