PLASMA TREATMENT APPARATUS

PROBLEM TO BE SOLVED: To enhance the utilization efficiency of active species and to carry out a high-speed plasma treatment, without troubles when carrying out a plasma treatment to a comparatively large substrate, in an atmospheric pressure plasma treatment apparatus. SOLUTION: A plasma treatment...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NISHIKAWA KAZUHIRO, YOSHIMOTO SHOZO, TAKAHASHI DAISUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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