METHOD OF DETECTING VOLATILE ORGANIC COMPOUND

METHOD OF DETECTING VOLATILE ORGANIC COMPOUND

PROBLEM TO BE SOLVED: To provide a method of detecting a volatile organic compound existing on a base material surface. SOLUTION: This method of detecting the volatile organic compound existing on the base material surface has (1) a process for bringing the compound into reaction with a volatility m...

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Hauptverfasser: TANJI NORIBUMI, OKAMOTO MASAYUKI
Format: Patent
Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator TANJI NORIBUMI
OKAMOTO MASAYUKI
description PROBLEM TO BE SOLVED: To provide a method of detecting a volatile organic compound existing on a base material surface. SOLUTION: This method of detecting the volatile organic compound existing on the base material surface has (1) a process for bringing the compound into reaction with a volatility modifying reagent to make the compound nonvolatile, and (2) a process for measuring the base material surface by a time-of-flight secondary ion mass spectrometer (TOF-SIMS) to detect the compound. COPYRIGHT: (C)2006,JPO&NCIPI
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title METHOD OF DETECTING VOLATILE ORGANIC COMPOUND
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