METHOD OF DETECTING VOLATILE ORGANIC COMPOUND
PROBLEM TO BE SOLVED: To provide a method of detecting a volatile organic compound existing on a base material surface. SOLUTION: This method of detecting the volatile organic compound existing on the base material surface has (1) a process for bringing the compound into reaction with a volatility m...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method of detecting a volatile organic compound existing on a base material surface. SOLUTION: This method of detecting the volatile organic compound existing on the base material surface has (1) a process for bringing the compound into reaction with a volatility modifying reagent to make the compound nonvolatile, and (2) a process for measuring the base material surface by a time-of-flight secondary ion mass spectrometer (TOF-SIMS) to detect the compound. COPYRIGHT: (C)2006,JPO&NCIPI |
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