METHOD OF DETECTING VOLATILE ORGANIC COMPOUND

PROBLEM TO BE SOLVED: To provide a method of detecting a volatile organic compound existing on a base material surface. SOLUTION: This method of detecting the volatile organic compound existing on the base material surface has (1) a process for bringing the compound into reaction with a volatility m...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TANJI NORIBUMI, OKAMOTO MASAYUKI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method of detecting a volatile organic compound existing on a base material surface. SOLUTION: This method of detecting the volatile organic compound existing on the base material surface has (1) a process for bringing the compound into reaction with a volatility modifying reagent to make the compound nonvolatile, and (2) a process for measuring the base material surface by a time-of-flight secondary ion mass spectrometer (TOF-SIMS) to detect the compound. COPYRIGHT: (C)2006,JPO&NCIPI