APPARATUS FOR FORMING ORGANIC THIN FILM, AND METHOD THEREFOR

PROBLEM TO BE SOLVED: To provide an apparatus which can control the thickness of an organic film so as to precisely form a functional device with an organic thin film having a desired film thickness and film composition, with a simple motion mechanism. SOLUTION: A measuring instrument for measuring...

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Bibliographische Detailangaben
Hauptverfasser:	SHIRAI OSAMU, ATAMI AKIHIKO, KIDO JUNJI, KODERA KYOSUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METALLURGY PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus which can control the thickness of an organic film so as to precisely form a functional device with an organic thin film having a desired film thickness and film composition, with a simple motion mechanism. SOLUTION: A measuring instrument for measuring the concentration of a doped material in the organic thin film formed on a structure comprises: a light source for irradiating the structure with a light having such a wavelength range as to include at least an exciting light, at least in a period of forming the film; a detecting means for detecting the fluorescence intensity emitted from the structure in response to the irradiated light, by receiving at least fluorescent light from the structure; and a measuring means for measuring the concentration of the doping material doped into the organic film, on the basis of the thickness of the organic thin film and the fluorescence intensity. COPYRIGHT: (C)2006,JPO&NCIPI