ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING CERAMIC ELECTROSTATIC CHUCK

PROBLEM TO BE SOLVED: To provide an electrostatic chuck, capable of more improving the uniformity of temperature (intra-surface temperature distribution) over the whole surface of a chuck face in the electrostatic chuck having an electric heater. SOLUTION: In a ceramic electrostatic chuck 1, including a chucking electrode layer 4 and a resisting heating element 31 in its inside, the resisting heating element 31, formed spirally like a plane from a metallic plate with fixed thickness, is held between a ceramic substrate 11, including the chucking electrode layer 4 in its inside and baked integrally with the electrode layer 4 and another baked ceramic substrate 21, and both the ceramic substrates 11, 21 are stuck to each other by glass 30 to include the resisting heating element 31 in their inside. Since a baking process is not used for arranging the resisting heating element 31, consisting of the metallic plate with the fixed thickness, the problem of impossibility of manufacturing an electrostatic chuck can be solved, and the electrostatic chuck provided with the resisting heating element can be obtained, in which the dispersion of resistance values is small. COPYRIGHT: (C)2006,JPO&NCIPI