PROJECTION ALIGNER

PROBLEM TO BE SOLVED: To provide a projection aligner which can achieve alignment with high accuracy and no alignment error and which eliminates retreating of a work on alignment, to reduce the tact time. SOLUTION: The projection aligner has a configuration with alignment between a belt-like work and a reticle being carried out by obtaining a reticle correction amount from a referential shift between a work alignment reference mark 402 on a work suction table 45 and a table alignment mark 401, from a reticle shift as a positional shift between a reticle alignment mark 301 and the table alignment mark 401 projected on the reticle, and from the shift amount of a work alignment mark 501 from the work alignment reference mark 402, and then moving the reticle 42 by the reticle correction amount . COPYRIGHT: (C)2006,JPO&NCIPI