STORAGE CONTAINER AND STORAGE METHOD FOR SEMICONDUCTOR SUBSTRATE

PROBLEM TO BE SOLVED: To provide a storage container and a storage method for a semiconductor substrate which can prevent the raising of particles attached to the inner wall of the container by the introduction of an inert gas, and can improve replacement efficiency into the inert gas. SOLUTION: The...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	YAMAZAKI TAKAHIDE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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