SUBSTRATE CASSETTE

PROBLEM TO BE SOLVED: To reduce the total height of a substrate cassette by reducing the height of an accommodation rack of a substrate in the substrate cassette. SOLUTION: The accommodation rack S of the substrate G is formed to a cassette frame 1 forming a substrate cassette C1by mounting many wires 5, in a state that tension is given at a predetermined interval to both the horizontal direction and the vertical direction along the incoming and outgoing direction P of the substrate G, the flexure of a supporting member 7 and that of the substrate G are reduced by supporting the substrate G by a plurality of the flat type supporting members 7 extended to the wires 5 in each stage, an arm inserting space V is formed to lift the substrate G between the substrate G and wires 5, and moreover the total height H of the substrate cassette C1is lowered by reducing the height of rack h of the accommodation rack S in each stage of the substrate cassette C1. COPYRIGHT: (C)2006,JPO&NCIPI