MEASURING INSTRUMENT FOR INSPECTING OBJECT OPTICALLY, AND OPERATION METHOD FOR MEASURING INSTRUMENT

PROBLEM TO BE SOLVED: To finely measure expanded structure, in particular, line structure, with a reduced measuring error, in a measuring instrument for inspecting an object optically and an operation method for the measuring instrument. SOLUTION: This measuring instrument is provided with means 14,...

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Bibliographische Detailangaben
Hauptverfasser:	DANNER LAMBERT, RINN KLAUS
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To finely measure expanded structure, in particular, line structure, with a reduced measuring error, in a measuring instrument for inspecting an object optically and an operation method for the measuring instrument. SOLUTION: This measuring instrument is provided with means 14, 15 for imparting transition characteristics of continuous monotone functions to intensities of lights from light sources 6, 13, within a pupil face of an image focusing optical system 9 or an irradiation optical system 8, or within a plane of irradiation optical paths 4, 5 conjugated thereto or an image focusing optical path 11. COPYRIGHT: (C)2006,JPO&NCIPI