CAPACITANCE TYPE SENSOR
PROBLEM TO BE SOLVED: To provide a capacitance type sensor protected from mechanical impact and static destruction with a structure free from the influence of an attachment such as a finger print without spoiling the fundamental detection performance such as detection sensitivity and positional reso...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a capacitance type sensor protected from mechanical impact and static destruction with a structure free from the influence of an attachment such as a finger print without spoiling the fundamental detection performance such as detection sensitivity and positional resolution. SOLUTION: The capacitance type sensor is the sensor for detecting the variation of capacitance between the detection electrodes arrayed on the surface of the sensor and the object to be detected. A plurality of through electrodes are characteristically provided with a plate material having a clearance from the surface of the sensor. COPYRIGHT: (C)2006,JPO&NCIPI |
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