GAS SUPPLY ACCUMULATING UNIT

PROBLEM TO BE SOLVED: To provide a gas supply integrating unit for supplying process gas which is easily liquefied at normal temperature/normal pressure, while heating and keeping it warm. SOLUTION: The gas supply integration unit has a plurality of gas units. In the gas units, a first manual valve...

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Bibliographische Detailangaben
Hauptverfasser:	MIWA TOSHIICHI, INOUE TAKASHI, AOYAMA TATSUTO, TAKECHI AKIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY PIPE-LINE SYSTEMS PIPE-LINES SEMICONDUCTOR DEVICES STORING OF DISTRIBUTING GASES OR LIQUIDS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a gas supply integrating unit for supplying process gas which is easily liquefied at normal temperature/normal pressure, while heating and keeping it warm. SOLUTION: The gas supply integration unit has a plurality of gas units. In the gas units, a first manual valve 22 provided to an outlet flow path, an air-operated valve 26 provided to a position communicating the first hand valve 22 and a process gas common flow path 44, and a second manual valve 25 provided to a position communicating the first manual valve 22 and a purge gas common flow path 43, are integrally connected in series by means of a flow path block 46 and a unit fixing plate 15. It has a holding member 18 of a U-shaped cross section, where the flow path block 46 and the unit fixing plate 15 are fit, and a planar heater 16 which is fixed being held between the holding member 18 and the flow path block 46 and the unit fixing plate 15. COPYRIGHT: (C)2006,JPO&NCIPI