METHOD FOR STABILIZING DIELECTRIC CONSTANT OF Si-O CONTAINING CERAMIC COATING

PROBLEM TO BE SOLVED: To form a Si-O containing ceramic coating having an improved property such as a stable dielectric constant on an electronic substrate. SOLUTION: The method for stabilizing a Si-O containing ceramic coating derived from a hydrogen silsesquioxane resin contains a process for expo...

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Hauptverfasser:	CAMILLETTI ROBERT C, DUNN DIANA KAY, BALLANCE DAVID S
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS COMPOUNDS THEREOF CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY LIME, MAGNESIA METALLURGY NON-METALLIC ELEMENTS REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To form a Si-O containing ceramic coating having an improved property such as a stable dielectric constant on an electronic substrate. SOLUTION: The method for stabilizing a Si-O containing ceramic coating derived from a hydrogen silsesquioxane resin contains a process for exposing the Si-O containing ceramic coating derived from the hydrogen silsesquioxane resin to an atmosphere containing hydrogen gas for a time and at a temperature sufficient for stabilizing the dielectric constant of the coating. COPYRIGHT: (C)2006,JPO&NCIPI