LAMINATE FOR FORMING WIRING BOARD, ITS MANUFACTURING METHOD AND WIRING BOARD
PROBLEM TO BE SOLVED: To provide a laminate for forming a wiring board excellent in adhesion and low in resistance, a laminate manufacturing method, and the highly detailed wiring board of high reliability obtained from the laminate. SOLUTION: The laminate for forming the wiring board is constituted...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a laminate for forming a wiring board excellent in adhesion and low in resistance, a laminate manufacturing method, and the highly detailed wiring board of high reliability obtained from the laminate. SOLUTION: The laminate for forming the wiring board is constituted so that a substrate layer based on an Ni-Mo alloy and a conductor layer based on Al or an Al alloy are probided on a substrate and the substrate layer contains oxygen and/or nitrogen. The manufacturing method of the laminate by a sputtering method and the wiring board formed by etching the laminate are also disclosed. COPYRIGHT: (C)2006,JPO&NCIPI |
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