METHOD FOR ANALYZING NICKEL CONCENTRATION IN ALKALINE SOLUTION

PROBLEM TO BE SOLVED: To simply analyze concentration of nickel included in an alkaline solution, wherein the concentration of nickel is unknown. SOLUTION: An analyzing method includes a step of producing a P-type wafer group, to which boron has been doped so that the whole wafer has resistivity of 5-100 mΩcm; a step of sampling a reference sample from the P-type wafer group; a step of contacting the reference sample with an alkaline standard solution, having known Ni concentration value; a step of measuring the Ni, concentration value of the whole reference sample being in contact with the alkaline standard solution; a step of creating a correlation straight line from a result of the Ni concentration measurement and the concentration of the Ni included in the alkaline standard solution; a step of sampling a sample to be measured from the P-type wafer group; a step of contacting the sample to be measured with the alkaline solution, wherein the concentration of Ni is unknown; a step of measuring a nickel concentration value of the whole sample to be measured being, in contact with the alkaline solution; and a step of estimating the concentration of Ni, included in the alkaline solution by checking a result of the nickel concentration measurement, on the basis of the correlation straight line. COPYRIGHT: (C)2006,JPO&NCIPI