SERVO-TYPE SENSOR DIAGNOSIS METHOD AND SERVO-TYPE SENSOR

PROBLEM TO BE SOLVED: To provide a servo-type sensor diagnosis method for performing failure diagnosis using a simple structure, and to provide a servo-type sensor. SOLUTION: After a pendulum 1 is positioned at a prescribed equilibrium point, in addition to a drive signal given to a pendulum drive p...

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Bibliographische Detailangaben
Hauptverfasser: FURUKAWA HIROYUKI, YANADA TAKASHI, TAKUBO HIKARI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a servo-type sensor diagnosis method for performing failure diagnosis using a simple structure, and to provide a servo-type sensor. SOLUTION: After a pendulum 1 is positioned at a prescribed equilibrium point, in addition to a drive signal given to a pendulum drive part by a servo amplifier 7, a different drive signal is further given to the drive part. When a detection value, detected by a displacement amount detection part 6, does not change in response to the given different drive signal, the sensor is determined as being abnormal. COPYRIGHT: (C)2006,JPO&NCIPI