SEALING TERMINAL STRUCTURE OF HEATER AND HEATER USING THE SAME

PROBLEM TO BE SOLVED: To provide a sealing terminal structure and a heater using the same, having strong mechanical intensity, a convenient handling, capable of easily forming a seal terminal part, and also, enlarging the allowable temperature range and the allowable electrical current. SOLUTION: The seal terminal structure of a heater storing a heating element 2 in a silica glass member 1 is equipped with connection wires 6a, 6b supplying power to the heating element 2, and thermal expansion inclination parts 7a, 7b changing the thermal expansion coefficient in the radial direction of the connection wires formed by laminating a plurality of glasses, having different thermal expansion ratios on an outer peripheral surface of the connection wires 6a, 6b. The connection wires 6a, 6b are attached to the silica glass member 1 via the thermal expansion inclination parts 7a, 7b. COPYRIGHT: (C)2006,JPO&NCIPI