INKJET HEAD, INKJET RECORDER EQUIPPED WITH THE SAME AND MANUFACTURING METHOD FOR INKJET HEAD
PROBLEM TO BE SOLVED: To provide an inkjet head which can improve a displacement amount of an active section and can lower the resistance of the wiring section of upper part electrodes. SOLUTION: The inkjet head 41 comprises a pressure chamber member 7 having a pressure chamber 8 formed therein, a v...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an inkjet head which can improve a displacement amount of an active section and can lower the resistance of the wiring section of upper part electrodes. SOLUTION: The inkjet head 41 comprises a pressure chamber member 7 having a pressure chamber 8 formed therein, a vibrating layer 6 having a section of its lower surface to face the pressure chamber 8, and a piezoelectric element 14 applying pressure to the ink within the pressure chamber 8. The piezoelectric element 14 is formed of a lower electrode 5, a piezoelectric layer 4, a crystal orientation control layer 3 and an upper electrode 13 laminated successively. The upper electrode 13 has an active section 13a provided to a position corresponding to the pressure chamber 8 and a wiring section 13b connected to the active section 13a. The upper electrode 13 has two layers comprising a first electrode layer 2 provided on the crystal orientation control layer 3, and a second electrode layer 12 provided on the first electrode layer 2 and having Young's modulus less than the first electrode layer 2. COPYRIGHT: (C)2006,JPO&NCIPI |
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