OPTICAL WAVEGUIDE CHIP AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide an optical waveguide chip which is easy to obtain precise alignment of the optical axes with a single mode optical fiber and has a high transmission efficiency for single mode light with excellent heat resistance. SOLUTION: This optical waveguide chip 10 has a core 8, a clad layer comprising a lower clad layer 7 and an upper clad layer 9, and an optical fiber guide 6 to position the single mode optical fiber 11 to be connected with the core 8. The optical fiber guide 6 is formed by removing the die after half curing the coated layer 2 comprising a polysiloxane composite by irradiating with light or heating, then forming a V groove 5 using a die 4 and removing the die to further cure it by heating. COPYRIGHT: (C)2006,JPO&NCIPI