OPTICAL MEASURING INSTRUMENT AND OPTICAL MEASURING METHOD

PROBLEM TO BE SOLVED: To precisely measure a periodic array pattern of electrodes. SOLUTION: When a glass substrate of a measuring object is irradiated with convergence light via a condenser lens 114, diffraction light generated by the array pattern of the electrodes 31 is generated to be reflected...

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Bibliographische Detailangaben
Hauptverfasser:	HONJO TAKUYA, FUKUI HIROSHI, OKABE HIROSHI, FURUSAWA TAKUICHI
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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