OPTICAL MEASURING INSTRUMENT AND OPTICAL MEASURING METHOD

PROBLEM TO BE SOLVED: To precisely measure a periodic array pattern of electrodes. SOLUTION: When a glass substrate of a measuring object is irradiated with convergence light via a condenser lens 114, diffraction light generated by the array pattern of the electrodes 31 is generated to be reflected on a surface 3a and a reverse face 3b of the substrate. A one-dimensional CCD 122 is arranged in a position where surface reflected light and reverse face reflected light get incident under a condition near to a condensing condition. The respective reflected lights get incident separately into the CCD 122, and m-degree of the reverse face reflected light get incident between an incident position of m-degree of the surface reflected light and an incident position of (m+1) degree of the surface reflected light. Only the intensities of the surface reflected lights are extracted out of a photoreception quantity data obtained by the one-dimensional CCD 122, and the array pattern of the electrodes 31 is measured based on a distribution state thereof. COPYRIGHT: (C)2005,JPO&NCIPI