OPTICAL MEASURING INSTRUMENT AND OPTICAL MEASURING METHOD
PROBLEM TO BE SOLVED: To precisely measure a periodic array pattern of electrodes. SOLUTION: When a glass substrate of a measuring object is irradiated with convergence light via a condenser lens 114, diffraction light generated by the array pattern of the electrodes 31 is generated to be reflected...
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| creator | HONJO TAKUYA FUKUI HIROSHI OKABE HIROSHI FURUSAWA TAKUICHI |
| description | PROBLEM TO BE SOLVED: To precisely measure a periodic array pattern of electrodes. SOLUTION: When a glass substrate of a measuring object is irradiated with convergence light via a condenser lens 114, diffraction light generated by the array pattern of the electrodes 31 is generated to be reflected on a surface 3a and a reverse face 3b of the substrate. A one-dimensional CCD 122 is arranged in a position where surface reflected light and reverse face reflected light get incident under a condition near to a condensing condition. The respective reflected lights get incident separately into the CCD 122, and m-degree of the reverse face reflected light get incident between an incident position of m-degree of the surface reflected light and an incident position of (m+1) degree of the surface reflected light. Only the intensities of the surface reflected lights are extracted out of a photoreception quantity data obtained by the one-dimensional CCD 122, and the array pattern of the electrodes 31 is measured based on a distribution state thereof. COPYRIGHT: (C)2005,JPO&NCIPI |
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SOLUTION: When a glass substrate of a measuring object is irradiated with convergence light via a condenser lens 114, diffraction light generated by the array pattern of the electrodes 31 is generated to be reflected on a surface 3a and a reverse face 3b of the substrate. A one-dimensional CCD 122 is arranged in a position where surface reflected light and reverse face reflected light get incident under a condition near to a condensing condition. The respective reflected lights get incident separately into the CCD 122, and m-degree of the reverse face reflected light get incident between an incident position of m-degree of the surface reflected light and an incident position of (m+1) degree of the surface reflected light. Only the intensities of the surface reflected lights are extracted out of a photoreception quantity data obtained by the one-dimensional CCD 122, and the array pattern of the electrodes 31 is measured based on a distribution state thereof. 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SOLUTION: When a glass substrate of a measuring object is irradiated with convergence light via a condenser lens 114, diffraction light generated by the array pattern of the electrodes 31 is generated to be reflected on a surface 3a and a reverse face 3b of the substrate. A one-dimensional CCD 122 is arranged in a position where surface reflected light and reverse face reflected light get incident under a condition near to a condensing condition. The respective reflected lights get incident separately into the CCD 122, and m-degree of the reverse face reflected light get incident between an incident position of m-degree of the surface reflected light and an incident position of (m+1) degree of the surface reflected light. Only the intensities of the surface reflected lights are extracted out of a photoreception quantity data obtained by the one-dimensional CCD 122, and the array pattern of the electrodes 31 is measured based on a distribution state thereof. COPYRIGHT: (C)2005,JPO&NCIPI</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR |
| title | OPTICAL MEASURING INSTRUMENT AND OPTICAL MEASURING METHOD |
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