CONTACT PROBE AND INSPECTION EQUIPMENT OF SEMICONDUCTOR DEVICE USING THE SAME

PROBLEM TO BE SOLVED: To provide a contact probe and an inspection equipment of semiconductor device using it which are designed to insure to contact possibly with the electrodes of semiconductor devices, in order to prevent reduction of the yield. SOLUTION: The contact probe, whose measuring probe 5 is brought into contact to inspect the electrodes 11a and 11b of LED 11, is equipped with a foreign matter-removal system 6, whose removing section 7 removes foreign matters deposited on the electrodes 11a and 11b, by having the section 7 slide on the part the measuring probe 5 abutted against the electrodes 11a and 11b, while the removing section 7 is coated with photocatalyst. COPYRIGHT: (C)2005,JPO&NCIPI