SILICON PARTICLES, SILICON POWDER AND METHOD FOR MANUFACTURING SILICON PARTICLES
PROBLEM TO BE SOLVED: To provide high purity silicon nanoparticles, on an industrial scale, having a practical use as a powdery starting material for a high performance light emitting element and electronic components. SOLUTION: The silicon particles have a particle diameter of 1-50 nm and contain ≤...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide high purity silicon nanoparticles, on an industrial scale, having a practical use as a powdery starting material for a high performance light emitting element and electronic components. SOLUTION: The silicon particles have a particle diameter of 1-50 nm and contain ≤10 ppm, in total, of Na, Fe, Al and Cl. COPYRIGHT: (C)2005,JPO&NCIPI |
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