PROBE OPERATION OF CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To facilitate accurate positioning and/or direction setting of a probe or a sample with an SEM or the like. SOLUTION: An equipment 100 includes a positioner control device 102, a charged particle beam device 104, and a measurement device 106, coupled with each other so as to co...

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Bibliographische Detailangaben
Hauptverfasser: STALLCUP RICHARD E II, NELSON JAY C, HARTMAN ADAM, BAUR CHRISTOF, FOLARON ROBERT J, FOSTER PHILIP C
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To facilitate accurate positioning and/or direction setting of a probe or a sample with an SEM or the like. SOLUTION: An equipment 100 includes a positioner control device 102, a charged particle beam device 104, and a measurement device 106, coupled with each other so as to communicate in order to carry out start-up, adjustment, monitoring, mutual data collection, and/or termination. Communication among the devices can be interpreted by a control routine, and can be programmed by one or more devices of the equipment 100. COPYRIGHT: (C)2005,JPO&NCIPI