REFLECTION MEASURING INSTRUMENT OF HIGH SENSITIVITY

PROBLEM TO BE SOLVED: To provide a reflection measuring instrument of high sensitivity capable of bringing high sensitivity of measurement by simple constitution. SOLUTION: This reflection measuring instrument 12 of high sensitivity provided on an optical path X1(X4) between a light emitting means 14 and a detection means 16 of an analyzer 10, constituted to bring an incident angle θ of a measuring light 22 to a sample measuring face 20 into a range of 70° or more to less than 90° with respect to a direction orthogonal to the sample measuring face 20, and used when obtaining information about the sample measuring face 20, based on reflected light 24 from the sample measuring face 20, is provided with an incident angle side optical element 28 for bending an optical path of the measuring light 22 from the light emitting means 14 (X1-X2) to bring the incident angle θ of the measuring light 22 to the sample measuring face 20 into a desired angle within the range of 70° or more to less than 90°, and for transmitting the measuring light 22 as a linear polarization light having a desired vibration direction to get incident into the sample measuring face 20. COPYRIGHT: (C)2005,JPO&NCIPI