GLASS CERAMIC WIRING BOARD WITH BUILT-IN CAPACITOR
PROBLEM TO BE SOLVED: To provide a glass ceramic wiring board with built-in capacitor capable of suppressing the counter diffusion of a dielectric layer and a glass ceramic laminate, of preventing the lowering of the capacitance of a capacitor formed within the glass ceramic wiring board, and of res...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a glass ceramic wiring board with built-in capacitor capable of suppressing the counter diffusion of a dielectric layer and a glass ceramic laminate, of preventing the lowering of the capacitance of a capacitor formed within the glass ceramic wiring board, and of restraining its dispersion. SOLUTION: The glass ceramic wiring board with built-in capacitor includes therein the capacitor where an upper electrode layer 2 and a lower electrode layer 3 are disposed in the insulating substrate, where a plurality of insulating layers 1 each comprising glass ceramics are laminated while sandwiching a dielectric layer 4 containing barium titanate as a chief component; and a dielectric protective layer 5 in a radiation region extending from an end or a side surface of a region of the dielectric layer 4 sandwiched between the upper electrode layer 2 and the lower electrode layer 3 to the side of the insulating layer 1, up to ≥0.1 mm. COPYRIGHT: (C)2005,JPO&NCIPI |
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