GAS SENSOR

PROBLEM TO BE SOLVED: To provide a gas sensor for detecting an organic chlorine compound, such as carbon tetrachloride, with high sensitivity. SOLUTION: The gas sensor detects the organic chlorine compound, by heating an In2O3film in which approximately 5 wt.% CuO or NiO is added to about 200-400°C....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAMAOKI JUN, NAKAO AKINORI, UKO TOSHIHIRO, FUJIMORI HIROKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a gas sensor for detecting an organic chlorine compound, such as carbon tetrachloride, with high sensitivity. SOLUTION: The gas sensor detects the organic chlorine compound, by heating an In2O3film in which approximately 5 wt.% CuO or NiO is added to about 200-400°C. COPYRIGHT: (C)2005,JPO&NCIPI