PRESSURE SENSOR
PROBLEM TO BE SOLVED: To provide a small-sized pressure sensor with a wide fluid pressure measurement range. SOLUTION: This pressure sensor comprises a diaphragm 21 having a peripheral edge part fixed in a case 10 and deformed by a fluid pressure given to at least one side, and a signal conversion p...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a small-sized pressure sensor with a wide fluid pressure measurement range. SOLUTION: This pressure sensor comprises a diaphragm 21 having a peripheral edge part fixed in a case 10 and deformed by a fluid pressure given to at least one side, and a signal conversion part 40 for converting the deformation of the diaphragm 21 into an electric signal. The conversion part 40 comprises an oscillation circuit formed of a print coil 46 printed on one side of a printed circuit board 45, and the print coil 46 confronts the diaphragm 21 at a prescribed distance. COPYRIGHT: (C)2005,JPO&NCIPI |
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