VERTICAL AXIS FOR SEMICONDUCTOR WELL HOLDER AND REVOLVING SLIDE PREVENTION DEVICE BETWEEN SUPPORT STRUCTURES AND METHOD OF THE SAME

PROBLEM TO BE SOLVED: To provide a substrate support assembly where a substrate holder support section is securely fixed to a rotating shaft with respect to a force applied to a rotative direction. SOLUTION: The substrate holder support section (spider) 10 has a plurality of support arms 12 extended...

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Hauptverfasser:	WEEKS THOMAS M, JACOBS LOREN R, BARNETT LEWIS C, WOOD ERIC R, HALPIN MICHAEL W
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate support assembly where a substrate holder support section is securely fixed to a rotating shaft with respect to a force applied to a rotative direction. SOLUTION: The substrate holder support section (spider) 10 has a plurality of support arms 12 extended toward the radial outside and upper side from a central socket 14 that supports the lower side of the substrate holder such as susceptor. The support assembly 8 comprises an elbow-shaped retention member 22 having an engagement section and a fixed section 32, and the engagement section is inserted in an opening 26 if positions of a socket opening section 26 and the cutout section of a shaft 20 are aligned to form a path. By engaging both the socket opening 26 and the cutout section of the shaft 20, the spider socket 14 is fixed to the shaft 20, thereby enabling the prevention of rotation between both, namely, revolving slide. COPYRIGHT: (C)2005,JPO&NCIPI