MICROSCOPE APPARATUS, METHOD FOR PROCESSING MICROSCOPE IMAGES, AND METHOD FOR INSPECTING SEMICONDUCTOR DEVICES
PROBLEM TO BE SOLVED: To provide an electron microscope capable of creating secondary electrons and transparent electron images that are not affected by the structure in the interior of thin film samples. SOLUTION: An electron microscope apparatus includes an ammeter 14 for detecting the variations...
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| creator | ETO RYUJI |
| description | PROBLEM TO BE SOLVED: To provide an electron microscope capable of creating secondary electrons and transparent electron images that are not affected by the structure in the interior of thin film samples. SOLUTION: An electron microscope apparatus includes an ammeter 14 for detecting the variations of feeble electric currents that flow between a sample holder to which an observation sample is attached and a wiring grounded to the earth, when an electron beam is irradiated onto a thin piece sample; and a signal processing device 11 capable of mixing up the signals obtained from the ammeter and the signals obtained from a secondary electron detector 9, or a transparent electron detector 10 or the like in a fixed proportion. The signals corrected by the signal processing device 11 and the signals of a deflecting signal control unit are synchronized and delivered to a display device. COPYRIGHT: (C)2005,JPO&NCIPI |
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SOLUTION: An electron microscope apparatus includes an ammeter 14 for detecting the variations of feeble electric currents that flow between a sample holder to which an observation sample is attached and a wiring grounded to the earth, when an electron beam is irradiated onto a thin piece sample; and a signal processing device 11 capable of mixing up the signals obtained from the ammeter and the signals obtained from a secondary electron detector 9, or a transparent electron detector 10 or the like in a fixed proportion. The signals corrected by the signal processing device 11 and the signals of a deflecting signal control unit are synchronized and delivered to a display device. 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SOLUTION: An electron microscope apparatus includes an ammeter 14 for detecting the variations of feeble electric currents that flow between a sample holder to which an observation sample is attached and a wiring grounded to the earth, when an electron beam is irradiated onto a thin piece sample; and a signal processing device 11 capable of mixing up the signals obtained from the ammeter and the signals obtained from a secondary electron detector 9, or a transparent electron detector 10 or the like in a fixed proportion. The signals corrected by the signal processing device 11 and the signals of a deflecting signal control unit are synchronized and delivered to a display device. 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SOLUTION: An electron microscope apparatus includes an ammeter 14 for detecting the variations of feeble electric currents that flow between a sample holder to which an observation sample is attached and a wiring grounded to the earth, when an electron beam is irradiated onto a thin piece sample; and a signal processing device 11 capable of mixing up the signals obtained from the ammeter and the signals obtained from a secondary electron detector 9, or a transparent electron detector 10 or the like in a fixed proportion. The signals corrected by the signal processing device 11 and the signals of a deflecting signal control unit are synchronized and delivered to a display device. COPYRIGHT: (C)2005,JPO&NCIPI</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING ELECTRIC VARIABLES MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| title | MICROSCOPE APPARATUS, METHOD FOR PROCESSING MICROSCOPE IMAGES, AND METHOD FOR INSPECTING SEMICONDUCTOR DEVICES |
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