MANUFACTURING METHODS OF HARD MASK, PEDESTAL, AND MAGNETIC RECORDING HEAD, AND MICRO STRUCTURE

PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording head which allows the magnetic recording head provided with a divided write shield to be manufactured with high precision. SOLUTION: This method has (1) a step of forming a magnetic pole 16Z, an insulating layer 51, a non-magnetic recording-gap layer 15, a magnetic pole 14Z, and an etching stop layer 61, (2) a step of forming a hard mask, (3) a step of etching (trimming) the magnetic pole 16Z, the insulating layer 51, the non-magnetic recording-gap layer 15, the magnetic pole 14Z, and the etching stop layer 61 using the hard mask and forming an opening to form the pedestal (a main pole/the non-magnetic recording-gap layer 15/the divided write shield) which has a trim structure. Further, the method has (4) a step of forming the insulating layer so as to embed the opening, (5) a step of collectively polishing the hard mask with the insulating layer until the etching stop layer 61 is exposed using a CMP method, and (6) a step of polishing the divided write shield until it becomes a desired thickness using the CMP method. COPYRIGHT: (C)2005,JPO&NCIPI