SYNTHESIS OF CARBON NANOTUBE BY LASER BEAM

PROBLEM TO BE SOLVED: To grow a carbon nanotube (CNT) on a specific position of a substrate to dispense with re-arrangement, to prevent the degradation of CNT characteristics and to facilitate the formation of an electronic device, such as a single or high integration CNT-FET, a fuel cell, a sensor or the like without the rearrangement. SOLUTION: In the synthesis of the carbon nanotube using acetylene (C2H2) or ethylene (C2H4) or the like containing carbon (C) as a reaction gas, the carbon nanotube or an allotrope such as a carbon nanofiber or a whisker is synthesized in contact with a metallic catalyst or in contact with a substrate when the metallic catalyst is completely formed into fine particles, wherein the metallic catalyst such as iron (Fe), cobalt (Co) or nickel (Ni) is patterned to form a metallic catalyst thin line on the substrate such as silicon, and only the pattern portion and the reaction gas in contact with the pattern portion are irradiated with laser beam to heat them to a reaction temperature. COPYRIGHT: (C)2005,JPO&NCIPI