INSPECTION DEVICE AND MANUFACTURING APPARATUS

PROBLEM TO BE SOLVED: To provide an inspection device by which tape reels are inspected in a short period of time while maintaining inspection precision at a high level. SOLUTION: The inspection device is provided with turntables 3 which are used to mount tape reels 12 that are arranged at both tip sections of cylindrical hubs 13 with bottoms where tapes are wound around so that lower flanges 14 and upper flanges 15 are opposed to each other, measuring sections 4 which are used to measure the deflection amount in the thickness direction of the both flanges 14 and 15 on the tape reels 12 mounted on the turntables 13, rotating mechanisms which are used to rotate the turntables 3, and an inspection section which is used to inspect the tape reels 12 on the basis of the deflection amounts measured by the measuring sections 4 in a state the turntables 3 are rotated. The turntables 3 have cylindrical mounting sections 31 upper end faces of which abut on either one of the outer surfaces of the flanges 14 and 15 of the mounted tape reels 12 and the sections 31 are constituted to suck the tape reels 12. COPYRIGHT: (C)2005,JPO&NCIPI