SUBSTRATE HOLDER

PROBLEM TO BE SOLVED: To provide a substrate holder capable of easily, rapidly and safely attaching/detaching a top ring. SOLUTION: The substrate holder comprises a top ring 10 to hold a substrate and a supporting shaft 28 to transmit the rotational driving force from a driving mechanism to the top...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	NISHI TOYOMI, KOJIMA SHIYUNICHIROU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate holder capable of easily, rapidly and safely attaching/detaching a top ring. SOLUTION: The substrate holder comprises a top ring 10 to hold a substrate and a supporting shaft 28 to transmit the rotational driving force from a driving mechanism to the top ring 10 via a transmission mechanism 40. The supporting shaft 28 is split into a tip side portion including the transmission mechanism, and a base end side portion communicated with the transmission mechanism. The tip side portion is attachable/detachable to/from the base end side portion. COPYRIGHT: (C)2005,JPO&NCIPI