WORKPIECE CENTERING CLAMP APPARATUS, ROTATION DRIVING APPARATUS, ELECTRONIC BEAM EXPOSURE APPARATUS AND OPTICAL DISK STAMPER

PROBLEM TO BE SOLVED: To provide an electronic beam exposure apparatus capable of accurately performing electronic beam exposure while stably holding a workpiece by matching the workpiece with a turn table and the center of rotation without using electromagnetic or mechanical external force in vacuu...

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Bibliographische Detailangaben
1. Verfasser:	MURAYAMA NOBORU
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MATERIALS THEREFOR METAL-WORKING NOT OTHERWISE PROVIDED FOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an electronic beam exposure apparatus capable of accurately performing electronic beam exposure while stably holding a workpiece by matching the workpiece with a turn table and the center of rotation without using electromagnetic or mechanical external force in vacuum. SOLUTION: A workpiece centering clamp apparatus 10 includes clamp mechanisms 101 of three units which are arrayed rotationally symmetrically on a turn table 623, a link 103 of each clamp mechanism 101 rotates in parallel with the turn table, and a clamper 102 is provided in one end of the link 103 and disposed near the outer periphery of an area wherein a resist plate 8 is installed. A weight 104 is disposed within a weight guide 109 having the hollow shape of a fixed length to be movable only in a radial direction, one end of the link 103 without clamper 102 is inserted from an opening of a link guide 108, the weight 104 operates as a slider for rotating the link 103, and a spring 105 applies pressure in the radial direction to the weight 104. COPYRIGHT: (C)2005,JPO&NCIPI