VAPOR DEPOSITION BOAT

PROBLEM TO BE SOLVED: To provide a vapor deposition boat suitable for performing a reliable and stable vapor deposition step even when electric heating is performed for a long period of time. SOLUTION: A molten metal pool 2 to store a thin film material is formed on a surface 1c side, and through holes 12a and 12b penetrating the face side 1c and back side 1d of the boat are formed between the molten metal pool 2 and electrodes 3 and 4, respectively, in the vapor deposition boat 1 constituted by connecting the electrodes 3 and 4 to both ends 1a and 1b at the positions across the molten metal pool 2. The through holes 12a and 12b are formed by allowing respective tapered bottomed hole parts 13a and 13b extending toward a boat back side 1d to communicate with respective through hole parts 15a and 15b reaching respective bottom surfaces 14a and 14b of the respective tapered bottomed holes 13a and 13b from the boat face side 1c. COPYRIGHT: (C)2005,JPO&NCIPI